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28 results

Conference Proceedings

1. Film thickness measurement tool with a stress measurement function

M. Horie ; K. Akashika ; S. Shiota ; S. Yamaguchi ; K. Yamana

Pub. info.:	Metrology, inspection, and process control for microlithography XXII. 2 pp.692235-1-692235-6, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6922

Conference Proceedings

2. Accuracy of mask pattern contour extraction with fine-pixel SEM images

S. Yamaguchi ; E. Yamanaka ; H. Mukai ; T. Kotani ; H. Mashita

Pub. info.:	Photomask technology 2007. 2 pp.673036-1-673036-12, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6730

Conference Proceedings

3. UV-reflectometory for fast trench-depth measurement

M. Horie ; S. Shiota ; S. Yamaguchi ; K. Yamana ; M. Kobayashi

Pub. info.:	Metrology, inspection, and process control for microlithography XXII. 2 pp.69223D-1-69223D-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6922

Conference Proceedings

4. Spectroscopic ellipsometer for ultra thin film

K. Akashika ; S. Shiota ; S. Yamaguchi ; M. Horie ; M. Kobayashi

Pub. info.:	Metrology, inspection, and process control for microlithography XXII. 2 pp.69223M-1-69223M-5, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6922

Conference Proceedings

5. Slicing of Rotating SiC Ingot by Electric Discharge Machining

N. Yamamoto ; S. Yamaguchi ; T. Kato

Pub. info.:	Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation. pp.843-846, 2013. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	740-742

Conference Proceedings

6. Electric Discharge Machining for Silicon Carbide in Gases of Ar, Ar-CH₄ and Ar-CF₄ Mixtures

T. Sugimoto ; T. Noro ; S. Yamaguchi ; H. Majima ; T. Kato

Pub. info.:	Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009. pp.869-872, 2010. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	645-648

Conference Proceedings

7. Effects of Machining Fluid on Electric Discharge Machining of SiC Ingot

N. Yamamoto ; S. Yamaguchi ; T. Kato

Pub. info.:	Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan. pp.767-770, 2014. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	778-780

Conference Proceedings

8. Numerical Study of Blood Flow in the Hepatic Portion of the Inferior Vena Cava

M. Matsubara ; M. Watanabe ; S. Watanabe ; K. Konishi ; M. Hashizume ; S. Yamaguchi

Pub. info.:	ASME/JSME 2007 5th Joint Fluids Engineering Conference (FEDSM2007). 2A pp.695-698, 2007. New York. American Society of Mechanical Engineers
Title of ser.:	ASME Symposia Volumes
Ser. no.:	FEDSM 2007(2A)

Conference Proceedings

9. A Partitioned Algorithm of Dynamic Fluid-Structure Interaction for Elephant Foot Bulging of Tanks

Q. Li ; H. Z. Liu ; Z. Zhuang ; S. Yamaguchi ; M. Toyoda

Pub. info.:	Proceedings of the ASME Pressure Vessels and Piping Conference 2006. Volume 8. Seismic engineering : presented at 2006 ASME Pressure Vessels and Piping Conference, July 23-27, 2006, Vancouver, BC, Canada. 8 pp.249-256, 2007. New York. American Society of Mechanical Engineers
Title of ser.:	Proceedings of the ASME Pressure Vessels and Piping Division
Ser. no.:	2006(8)

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Conference Proceedings

10. Development of a New Added Mass Model and Dynamic Analysis for Cylindrical Tank

Z. Zhuang ; H. Z. Liu ; Q. Li ; S. Yamaguchi ; M. Toyoda

Pub. info.:	Proceedings of the ASME Pressure Vessels and Piping Conference 2006. Volume 8. Seismic engineering : presented at 2006 ASME Pressure Vessels and Piping Conference, July 23-27, 2006, Vancouver, BC, Canada. 8 pp.239-248, 2007. New York. American Society of Mechanical Engineers
Title of ser.:	Proceedings of the ASME Pressure Vessels and Piping Division
Ser. no.:	2006(8)

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Author: S. Yamaguchi