1.

Conference Proceedings

Conference Proceedings
M. Horie ; K. Akashika ; S. Shiota ; S. Yamaguchi ; K. Yamana
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.692235-1-692235-6,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
2.

Conference Proceedings

Conference Proceedings
S. Yamaguchi ; E. Yamanaka ; H. Mukai ; T. Kotani ; H. Mashita
Pub. info.: Photomask technology 2007.  2  pp.673036-1-673036-12,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
3.

Conference Proceedings

Conference Proceedings
M. Horie ; S. Shiota ; S. Yamaguchi ; K. Yamana ; M. Kobayashi
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.69223D-1-69223D-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
4.

Conference Proceedings

Conference Proceedings
K. Akashika ; S. Shiota ; S. Yamaguchi ; M. Horie ; M. Kobayashi
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.69223M-1-69223M-5,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
5.

Conference Proceedings

Conference Proceedings
N. Yamamoto ; S. Yamaguchi ; T. Kato
Pub. info.: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.843-846,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 740-742
6.

Conference Proceedings

Conference Proceedings
T. Sugimoto ; T. Noro ; S. Yamaguchi ; H. Majima ; T. Kato
Pub. info.: Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009.  pp.869-872,  2010.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 645-648
7.

Conference Proceedings

Conference Proceedings
N. Yamamoto ; S. Yamaguchi ; T. Kato
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.767-770,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
8.

Conference Proceedings

Conference Proceedings
M. Matsubara ; M. Watanabe ; S. Watanabe ; K. Konishi ; M. Hashizume ; S. Yamaguchi
Pub. info.: ASME/JSME 2007 5th Joint Fluids Engineering Conference (FEDSM2007).  2A  pp.695-698,  2007.  New York.  American Society of Mechanical Engineers
Title of ser.: ASME Symposia Volumes
Ser. no.: FEDSM 2007(2A)
9.

Conference Proceedings

Conference Proceedings
Q. Li ; H. Z. Liu ; Z. Zhuang ; S. Yamaguchi ; M. Toyoda
Pub. info.: Proceedings of the ASME Pressure Vessels and Piping Conference 2006. Volume 8. Seismic engineering : presented at 2006 ASME Pressure Vessels and Piping Conference, July 23-27, 2006, Vancouver, BC, Canada.  8  pp.249-256,  2007.  New York.  American Society of Mechanical Engineers
Title of ser.: Proceedings of the ASME Pressure Vessels and Piping Division
Ser. no.: 2006(8)
10.

Conference Proceedings

Conference Proceedings
Z. Zhuang ; H. Z. Liu ; Q. Li ; S. Yamaguchi ; M. Toyoda
Pub. info.: Proceedings of the ASME Pressure Vessels and Piping Conference 2006. Volume 8. Seismic engineering : presented at 2006 ASME Pressure Vessels and Piping Conference, July 23-27, 2006, Vancouver, BC, Canada.  8  pp.239-248,  2007.  New York.  American Society of Mechanical Engineers
Title of ser.: Proceedings of the ASME Pressure Vessels and Piping Division
Ser. no.: 2006(8)