1.

Conference Proceedings
Conference Proceedings
1. Structural and Morphological Properties of Nitrogen Doped Polysilicon for Advanced Gate Material
S. Woo ; Y. Kim ; P. Um ; H. Kim ; S. Cho
Pub. info.: Physics and technology of high-k gate dielectrics 5.  pp.601-606,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(4)
2.

Conference Proceedings
Conference Proceedings
2. Preparation of Porous Carbon with Bimodal Porous Structure and as a Electrode Material for Electric Double-Layer Capacitor
S. Woo ; K. Dokko ; H. Nakano ; K. Kanamura
Pub. info.: Intercalation Compounds for Batteries and Hybrid Supercapacitors.  pp.223-229,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(36)
3.

Conference Proceedings
Conference Proceedings
3. Fabrication of Porous Structure with Scandia Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cell
D. Peck ; Y. Choi ; S. Woo ; R. Song ; J. Wackerl ; T. Markus
Pub. info.: Solid oxide fuel cells 10 (SOFC-X).  pp.2187-2196,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 7(1)
4.

Conference Proceedings
Conference Proceedings
4. Macropore Formation in p-type Silicon and Si/SiGe/Si/SiGe/p-type Silicon
J. Kim ; H. Seo ; K. Kim ; H. Lyu ; S. Woo
Pub. info.: Porous semiconductors : a symposium held in memory of Vitali Parkhutik and Volker Lehmann.  pp.277-283,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(3)
5.

Conference Proceedings
Conference Proceedings
5. Macropore Formation in Prepatterned p-type Silicon
J. Kim ; K. Kim ; H. Seo ; H. Lyu ; S. Woo
Pub. info.: Porous semiconductors : a symposium held in memory of Vitali Parkhutik and Volker Lehmann.  pp.291-297,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(3)
6.

Conference Proceedings
Conference Proceedings
6. High-temperature Reactions between Scandia-doped Zirconia (ScSZ) and Cathode Materials
J. Wackerl ; T. Markus ; D. Peck ; S. Woo ; L. Singheiser
Pub. info.: Solid oxide fuel cells 10 (SOFC-X).  pp.859-868,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 7(1)
7.

Conference Proceedings
Conference Proceedings
7. New PEC optimization for the mask fabrication of sub-50nm memory device
S. Lee ; D. Ryu ; J. Park ; D. Nam ; H. Kim ; B. Kim ; S. Woo ; H. Cho
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607
8.

Conference Proceedings
Conference Proceedings
8. The study of CD behavior due to transmission control position change within photomask substrate
M. Kim ; H. Lee ; S. Woo ; K. Seo ; Y. Choi
Pub. info.: Photomask technology 2008.  2  pp.712239-1-712239-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
9.

Conference Proceedings
Conference Proceedings
9. Lithography enhanced manufacturability analysis by using multilevel simulated contours
B. Seo ; W. Choi ; J. Park ; S. Woo ; S. Lee
Pub. info.: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521