1.
Conference Proceedings
G. E. Bailey ; A. Tritchkov ; J. Park ; L. Hong ; V. Wiaux ; E. Hendrickx ; S. Verhaegen ; P. Xie ; J. Versluijs
Pub. info.:
Design for manufacturability through design-process integration . 6521 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6521
2.
Conference Proceedings
A. Nackaerts ; S. Verhaegen ; M. Dusa ; H. Kattouw ; F. van Bilsen ; S. Biesemans ; G. Vandenberghe
Pub. info.:
Design for manufacturability through design-process integration . 6521 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6521
3.
Conference Proceedings
M. Drapeau ; V. Wiaux ; E. Hendrickx ; S. Verhaegen ; T. Machida
Pub. info.:
Design for manufacturability through design-process integration . 6521 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6521
4.
Conference Proceedings
S. Verhaegen ; S. Cosemans ; M. Dusa ; P. Marchal ; A. Nackaerts
Pub. info.:
Design for manufacturability through design-process integration II . pp.69250R-1-69250R-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6925
5.
Conference Proceedings
V. Wiaux ; S. Verhaegen ; S. Cheng ; F. Iwamoto ; P. Jaenen
Pub. info.:
Optical Microlithography XXI . 1 pp.692409-1-692409-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6924
6.
Conference Proceedings
V. Wiaux ; S. Verhaegen ; F. Iwamoto ; M. Maenhoudt ; T. Matsuda
Pub. info.:
Lithography Asia 2008 . 1 pp.71401X-1-71401X-14, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7140