1.

Conference Proceedings
Conference Proceedings
1. Part-Load Performance of MCFC/APT Hybrid Power System
Y. Tsujikawa ; S. Terashima ; T. Yamauchi ; S. Katsura ; K. Kaneko
Pub. info.: Education; Industrial and Cogeneration; Marine; Oil and Gas Applications; Volume 7.  7  pp.337-344,  2008.  New York.  American Society of Mechanical Engineers
Title of ser.: ASME Symposia Volumes
Ser. no.: TURBO EXPO 2008(7)
2.

Conference Proceedings
Conference Proceedings
2. Carbon deposition on multi-layer mirrors by extreme ultra violet ray irradiation
S. Matsunari ; T. Aoki ; K. Murakami ; Y. Gomei ; S. Terashima ; H. Takase ; M. Tanabe ; Y. Watanabe ; Y. Kakutani ; M. Niibe ; Y. Fukuda
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
3.

Conference Proceedings
Conference Proceedings
3. Long-term durability of a Ru capping layer for EUVL projection optics by introducing ethanol
Y. Kakutani ; M. Niibe ; Y. Gomei ; H. Takase ; S. Terashima ; S. Matsunari ; T. Aoki ; Y. Fukuda
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
4.

Conference Proceedings
Conference Proceedings
4. Phenomenological analysis of carbon deposition rate on the multilayer mirror
T. Nakayama ; H. Takase ; S. Terashima ; T. Sudo ; Y. Watanabe
Pub. info.: Emerging lithographic technologies XII.  2  pp.69213B-1-69213B-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921