J.A. Stefani ; S. Poarch ; S. Saxena ; P.K. Mozumder
Pub. info.:
Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas. pp.25-36, 1994. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering