1.

Conference Proceedings
Conference Proceedings
1. Mobility-Enhanced Device Technologies Using SiGe/Ge MOS Channels
S. Takagi ; T. Irisawa ; T. Tezuka ; S. Nakaharai ; T. Numata
Pub. info.: ULSI process integration 5.  pp.61-74,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(6)
2.

Conference Proceedings
Conference Proceedings
2. Prospects and Critical Issues on Ge MOS Technologies
S. Takagi ; N. Taoka ; S. Nakaharai ; K. Ikeda ; T. Tezuka
Pub. info.: SiGe and Ge, materials, processing, and devices.  pp.823-829,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(7)
3.

Conference Proceedings
Conference Proceedings
3. Study of the Surface Cleaning of GOI and SGOI Substrates for Ge Epitaxial Growth
Y. Moriyama ; N. Hirashita ; E. Toyoda ; K. Usuda ; S. Nakaharai
Pub. info.: SiGe and Ge, materials, processing, and devices.  pp.1183-1190,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(7)