1.

Conference Proceedings
Conference Proceedings
1. Automatic optical proximity correction with optimization of stepper condition
S. Inoue ; T. Fujisawa ; S. Tanaka ; S. Mimotogi ; A. Nikki
Pub. info.: Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California.  pp.240-251,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2440
2.

Conference Proceedings
Conference Proceedings
2. Statistical approach utilizing neural networks for CD error prediction
M. Asano ; M. Satake ; S. Tanaka ; S. Mimotogi
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
3.

Conference Proceedings
Conference Proceedings
3. Performance of immersion lithography for 45-nm-node CMOS and ultra-high density SRAM with 0.25um2
S. Mimotogi ; F. Uesawa ; M. Tominaga ; H. Fujise ; K. Sho ; M. Katsumata ; H. Hane ; A. Ikegami ; S. Nagahara ; T. Ema ; M. Asano ; H. Kanai ; T. Kimura ; M. Iwai
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
4.

Conference Proceedings
Conference Proceedings
4. Mask topography effects of hole patterns on hyper-NA lithography
A. Mimotogi ; M. Itoh ; S. Mimotogi ; K. Sato ; T. Sato ; S. Tanaka
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607
5.

Conference Proceedings
Conference Proceedings
5. Virtual lithography system to improve the productivity of high-mix low-volume production
K. Yoshida ; T. Sato ; T. Kono ; E. Yamanaka ; M. Kariya ; A. Inoue ; S. Mimotogi
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607
6.

Conference Proceedings
Conference Proceedings
6. Patterning strategy and performance of 1.3NA tool for 32nm node lithography
S. Mimotogi ; M. Satake ; Y. Kitamura ; K. Takahata ; K. Kodera
Pub. info.: Optical Microlithography XXI.  1  pp.69240M-1-69240M-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
7.

Conference Proceedings
Conference Proceedings
7. Prediction of imaging performance of immersion lithography using high refractive index fluid
T. Sato ; M. Itoh ; A. Mimotogi ; S. Mimotogi ; K. Sato
Pub. info.: Optical Microlithography XXI.  2  pp.69242F-1-69242F-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
8.

Conference Proceedings
Conference Proceedings
8. Dependence of mask topography effects on pattern variation under hyper-NA lithography
A. Mimotogi ; M. Itoh ; S. Mimotogi ; K. Sato ; T. Sato
Pub. info.: Photomask and next-generation lithography mask technology XV.  2  pp.70283K-1-70283K-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
9.

Conference Proceedings
Conference Proceedings
9. Impact of patterning strategy on mask fabrication beyond 32nm
S. Mimotogi ; T. Higaki ; H. Kanai ; S. Tanaka ; M. Satake
Pub. info.: Photomask and next-generation lithography mask technology XV.  1  pp.702814-1-702814-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028