1.

Conference Proceedings

Conference Proceedings
S. Kim ; S. Koo ; J. Choi ; Y. Hwang ; J. Park ; E. Kang ; C. Lim ; S. Moon ; J. Kim
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings

Conference Proceedings
T.-S. Eom ; J.-T. Park ; J.-H. Kang ; S. Park ; S. Koo
Pub. info.: Optical Microlithography XXI.  1  pp.69240H-1-69240H-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
3.

Conference Proceedings

Conference Proceedings
S. Koo ; J. Kwon ; Y. Park ; O. Ayuzenara ; H. Kim
Pub. info.: ICMIT 2007, mechatronics, MEMS, and smart materials.  1  pp.679412-1-679412-5,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6794
4.

Conference Proceedings

Conference Proceedings
J. Kwon ; Y. Park ; S. Koo ; O. Ayurzana ; H. Kim
Pub. info.: ICMIT 2007, mechatronics, MEMS, and smart materials.  2  pp.67945J-1-67945J-6,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6794