1.
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Conference Proceedings
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S. Kim ; S. Koo ; J. Choi ; Y. Hwang ; J. Park ; E. Kang ; C. Lim ; S. Moon ; J. Kim
Pub. info.: |
Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6520 |
|
2.
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Conference Proceedings
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T.-S. Eom ; J.-T. Park ; J.-H. Kang ; S. Park ; S. Koo
Pub. info.: |
Optical Microlithography XXI. 1 pp.69240H-1-69240H-10, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6924 |
|
3.
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Conference Proceedings
|
S. Koo ; J. Kwon ; Y. Park ; O. Ayuzenara ; H. Kim
Pub. info.: |
ICMIT 2007, mechatronics, MEMS, and smart materials. 1 pp.679412-1-679412-5, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6794 |
|
4.
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Conference Proceedings
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J. Kwon ; Y. Park ; S. Koo ; O. Ayurzana ; H. Kim
Pub. info.: |
ICMIT 2007, mechatronics, MEMS, and smart materials. 2 pp.67945J-1-67945J-6, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6794 |
|