1.

Conference Proceedings
Conference Proceedings
1. Superplastic Forming and Foaming Process for Porous Aluminum Plates
K. Kitazono ; S. Kamimura ; E. Sato ; K. Kuribayashi
Pub. info.: Superplasticity in advanced materials : ICSAM 2006 : proceedings of the 9th International Conference on Superplasticity in Advanced Materials, 23-26 June 2006, Chengdu, P.R. China.  pp.23-30,  2007.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 551-552
2.

Conference Proceedings
Conference Proceedings
2. The resist materials study for the outgassing reduction and LWR improvement in EUV lithography
S. Masuda ; S. Kamimura ; S. Hirano ; W. Hoshino ; K. Mizutani
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519