1.

Technical Paper
Technical Paper
1. Multi-Objective Design Optimization of Loop Heat Pipe
Y. Park ; J. Kim ; S. Jun ; D. Lee ; M. Kwak ; D-H. Lee
Pub. info.: AIAA meeting papers on disc.  2008.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Multidisciplinary Analysis and Optimization Conference
Ser. no.: 2008
2.

Conference Proceedings
Conference Proceedings
2. Enhanced hole shape of flash devices in ArF lithography by eliptical mask bias technique
Y. Jeon ; S. Jun ; J. Kang ; S. Lee ; J. Kim ; K. Kim
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
3.

Conference Proceedings
Conference Proceedings
3. Optimization of lithography process to improve image deformation of contact hole sub-90 nm technology node
S. Jun ; J. Kim ; E. Jeong ; Y. Yun ; K. Kim
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
4.

Conference Proceedings
Conference Proceedings
4. Extension of low k1 lithography processes with KrF for 90nm technology node
S. Jun ; E. Jeong ; Y. Yun ; K. Choi ; J. Kim
Pub. info.: Optical Microlithography XXI.  2  pp.692439-1-692439-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924