J. Word ; K. Mizuuchi ; S. Fu ; W. Brown ; E. Sahouria
Pub. info.:
Photomask and next-generation lithography mask technology XV. 2 pp.70283F-1-70283F-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical transmission, switching, and subsystems VI. 2 pp.71362K-1-71362K-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical transmission, switching, and subsystems V. 2 pp.678335-1-678335-10, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering