L.H. Han ; J. Elliott ; S. Best ; R. Cameron ; A.C. Bentham
Pub. info.:
Physical and numerical simulation of materials processing : selected peer reviewed papers from the 5th International Conference on Physical and Numerical Simulation of Materials Processing, October 23-27, 2007, held in Zhengzhou, China. pp.560-565, 2008. Aedermannsdorf, Switzerland. Trans Tech Publications
M. Terry ; G. Zhang ; G. Lu ; S. Chang ; T. Aton ; R. Soper ; M. Mason ; S. Best ; B. Dostalik ; S. Hunsche ; J. W. Li ; R. Zhou ; M. Feng ; J. Burdorf
Pub. info.:
Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA. pp.69251C-1-69251C-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering