1.

Conference Proceedings
Conference Proceedings
1. Local Removal Frequency of Nano Particles in Megasonic Cleaning
T. Janssens ; K.L. Wostyn ; S. Arnauts ; A. De Geyter ; T. Bearda
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.353-360,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
2.

Conference Proceedings
Conference Proceedings
2. Post Ion-Implant Photoresist Removal via Wet Chemical Cleans Combined with Physical Force Pretreatments
G.G. Totir ; M. Frank ; R. Vos ; S. Arnauts ; T. Bearda
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.219-226,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
3.

Conference Proceedings
Conference Proceedings
3. Challenges with Respect to High-κ/Metal Gate Stack Etching and Cleaning
R. Vos ; S. Arnauts ; I. Bovie ; B. Onsia ; S. Garaud
Pub. info.: Physics and technology of high-k gate dielectrics 5.  pp.275-283,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(4)