1.

Conference Proceedings
Conference Proceedings
1. CRYSTAL ORIGINATED SINGULARITIES ON SILICON WAFERS AFTER SCl CLEANING
Morita, E. ; Ryuta, J. ; Tanaka, T. ; Shimanuki, Y.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.161-166,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. Adsorption and Desorption of Contaminant Metals on Si Wafer Surface in SC1 Solution
Maeda, G. ; Takahashi, I. ; Kondo, H. ; Ryuta, J. ; Shingyouji, T.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.195-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386