1.

Conference Proceedings
Conference Proceedings
1. Gate dielectric monitoring using noncontact electrical characterization
Ruzyllo,J. ; Roman,P. ; Lee,D.-O. ; Brubaker,M. ; Kamieniecki,E.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.198-206,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884
2.

Conference Proceedings
Conference Proceedings
2. Process monitoring using surface charge profiling(SCP)method
Ruzyllo,J. ; Roman,P. ; Staffa,J. ; Kashkoush,I. ; Kamieniecki,E.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II.  pp.162-173,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2876