Size Distribution of Oxide Precipitates Determined by Bright Field Infrared Laser Interferometer(Optical Precipitate Profiler)in Annealed Czochralski Silicon

Size Distribution of Oxide Precipitates Determined by Bright Field Infrared Laser Interferometer(Optical Precipitate Profiler)in Annealed Czochralski Silicon

Author(s):

Publication title:

Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3895

Pub. Year:

1999

Page(from):

487

Page(to):

495

Pub. info.:

Pennington, N.J.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434975 [0819434973]

Language:

English

Call no.:

P63600/3895

Type:

Conference Proceedings

Details

TDL ID:	ZA00018561
Series ID:	PA00000029
Conf. info. (Name):	ALTECH ; ESSDERC ; Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Conf. info. (Number):	1999
Conf. info. (Venue):	Leuven, Belgium
Conf. info. (Date):	1999.00.00

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