Rozgonyi, G. ; Tamatsuka, M. ; Bae, K.-M. ; Gonzales, F.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.153-172, 1997. Pennington, NJ. Electrochemical Society
Cho, C. R. ; Brown, R. A. ; Kononchuk, O. ; Yarykin, N. ; Rozgonyi, G. ; Zuhr, R.
Pub. info.:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.73-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Nanoscale materials and modeling -- relations among processing, microstructure and mechanical properties : symposium held April 13-16, 2004, San Francisco, California, U.S.A.. pp.43-48, 2004. Warrendale, Pa.. Materials Research Society
Nanoscale materials and modeling -- relations among processing, microstructure and mechanical properties : symposium held April 13-16, 2004, San Francisco, California, U.S.A.. pp.123-128, 2004. Warrendale, Pa.. Materials Research Society
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France. pp.81-92, 2005. Pennington, N.J.. Electrochemical Society
Rozgonyi, G. ; Lu, J. ; Zhao, W. ; Zhang, R. ; Chaumont, M.
Pub. info.:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France. pp.30-41, 2005. Pennington, N.J.. Electrochemical Society
Thin films : stresses and mechanical properties XI : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.409-416, 2005. Warrendale, Pa.. Materials Research Society