1.

Conference Proceedings
Conference Proceedings
1. Development of dioptric projection lenses for DUV lithography (Invited Paper)
Ulrich, W. ; Rostalski, H.-J. ; Hudyma, R.M.
Pub. info.: International optical design conference 2002 : 3-5 June, 2002, Tucson, Arizona, USA.  pp.158-169,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4832
2.

Conference Proceedings
Conference Proceedings
2. Use of diffractive lenses in lithographic projection lenses [6342-104]
Rostalski, H.-J. ; Epple, A. ; Feldmann, H.
Pub. info.: International Optical Design Conference 2006.  pp.63421S-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6342