1.

Conference Proceedings
Conference Proceedings
1. Lithographic image simulation for the 21st century with 19th-century tools
Gordon, R.L. ; Rosenbluth, A.E.
Pub. info.: Wave-optical wywtems engineering II : 3-4 August 2003, San Diego, California, USA.  pp.73-87,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5182
2.

Conference Proceedings
Conference Proceedings
2. Methodology for generating exposure tool specifications for alternating phase-shift mask application for 70-nm node
Lai, K. ; Gallatin, G.M. ; Rosenbluth, A.E. ; Fonseca, C.A. ; Liebmann, L.W. ; Progler, C.J.
Pub. info.: Optical Microlithography XV.  Part One  pp.336-347,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
3.

Conference Proceedings
Conference Proceedings
3. Assessing the impact of intrinsic birefringence on 157-nm lithography
Seong, N. ; Lai, K. ; Rosenbluth, A.E. ; Gallatin, G.M.
Pub. info.: Optical Microlithography XVII.  pp.99-103,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
4.

Conference Proceedings
Conference Proceedings
4. Fast calculation of images for high numerical aperture lithography
Rosenbluth, A.E. ; Gallatin, G.M. ; Gordon, R.L. ; Hinsberg, W. ; Hoffnagle, J. ; Houle, F. ; Lai, K. ; Lvov, A. ; Sanchez, M. ; Seong, N.
Pub. info.: Optical Microlithography XVII.  pp.615-628,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377