1.

Conference Proceedings
Conference Proceedings
1. Surface Preparation and Cleaning Challenges for Sub-65 nm Process Integration
Rosato, J.J.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.97-110,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
2.

Conference Proceedings
Conference Proceedings
2. *CONFIGURED SEMICONDUCTOR/INSULATOR COATINGS FOR CORROSION PREVENTION
Jain, F.C. ; Rosato, J.J. ; Kalonia, K.S. ; Agarwala, V.S.
Pub. info.: Materials stability and environmental degradation : symposium held April 5-7, 1988, Reno, Nevada, U.S.A..  pp.329-344,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 125
3.

Conference Proceedings
Conference Proceedings
3. In Situ Chemical Concentration Monitoring and Control of HF Oxide Etch Processes
Lindquist, P.G. ; Butler, J.N. ; Jarvis, T.D. ; Kelly, J.D. ; Hall, R.M. ; Rosato, J.J.
Pub. info.: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.277-282,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-33
4.

Conference Proceedings
Conference Proceedings
4. Surface Photovoltage Characterization of Heavy Metal Contamination and Wafer Cleaning Efficiency in Wet Chemical Processes
Rosato, J.J. ; Hall, R.M. ; Parry, T.B. ; Kelly, J.D. ; Butler, J.N. ; Jarvis, T.D. ; Lindquist, P.G.
Pub. info.: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.163-170,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-33
5.

Conference Proceedings
Conference Proceedings
5. STUDIES OF RINSE EFFICIENCIES IN WET CLEAMNG TOOLS
Rosato, J.J. ; Walters, R.N. ; Hall, R.M. ; Linquist, P.G. ; Spearow, R.G. ; Helms, C.R.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.140-152,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7