1.

Conference Proceedings

Conference Proceedings
Goethals,A.M. ; Vertommen,J. ; Roey,F.Van ; Yen,A. ; Tritchkov,A. ; Ronse,K. ; Jonckheere,R. ; hove,L.Van den
Pub. info.: Optical Microlithography IX.  Part1  pp.362-374,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
2.

Conference Proceedings

Conference Proceedings
Vandenberghe,G.N. ; Jaenen,P. ; Jonckheere,R.M. ; Ronse,K. ; Toublan,O.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  4409  pp.61-69,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
3.

Conference Proceedings

Conference Proceedings
Pollentier,I.K. ; Ercken,M. ; Eliat,A. ; Delvaux,C. ; Jaenen,P. ; Ronse,K.
Pub. info.: Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK.  4404  pp.56-67,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4404
4.

Conference Proceedings

Conference Proceedings
Maenhoudt,M. ; Goidsenhoven,D.Van ; Pollentier,I.K. ; Ronse,K. ; Lepage,M. ; Struyf,H. ; Hove,M.Van
Pub. info.: Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK.  4404  pp.1-13,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4404
5.

Conference Proceedings

Conference Proceedings
Verhaegen,S. ; Gordon,R.L. ; Jonckheere,R.M. ; McCallum,M. ; Ronse,K.
Pub. info.: Optical Microlithography XIV.  4346  pp.368-378,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
6.

Conference Proceedings

Conference Proceedings
Vandenberghe,G.N. ; Driessen,F. ; Adrichem,P.J.van ; Ronse,K. ; Li,J. ; Karklin,L.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.394-405,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
7.

Conference Proceedings

Conference Proceedings
Kim,Y.-C. ; Vandenberghe,G.N. ; Verhaegen,S. ; Ronse,K.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.954-967,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
8.

Conference Proceedings

Conference Proceedings
Jonckheere,R.M. ; Vandenberghe,G.N. ; Wiaux,V. ; Verhaegen,S. ; Ronse,K.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  4409  pp.108-117,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
9.

Conference Proceedings

Conference Proceedings
Ronse,K. ; Beeck,M.Opde ; Yen,A. ; Kim,K.-H. ; hove,L.Van den
Pub. info.: Optical Microlithography IX.  Part2  pp.555-563,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
10.

Conference Proceedings

Conference Proceedings
Beeck,M.Op de ; Bruggeman,B. ; Botermans,H. ; Driessche,V.Van ; Yen,A. ; Tritchkov,A. ; Jonckheere,R. ; Ronse,K. ; hove,L.Van den
Pub. info.: Optical Microlithography IX.  Part2  pp.622-633,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726