PASSIVE INTEGRATION PROCESS ON STANDARD AND HIGH RESISTIVITY SILICON
- Author(s):
- Kattelus,Hannu P. ( VTT Electronics )
- Ronkainen,H.
- Riihisaari,T.
- Publication title:
- 1999 International Conference on High Density Packaging and MCMs : 6-9 April 1999, The Adam's Mark Hotel, Denver, Colorado
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3830
- Pub. Year:
- 1999
- Page(from):
- 194
- Page(to):
- 199
- Pub. info.:
- Reston, VA: IMAPS
- ISSN:
- 0277786X
- ISBN:
- 9780930815578 [0930815572]
- Language:
- English
- Call no.:
- P63600/3830
- Type:
- Conference Proceedings
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