Blank Cover Image

PASSIVE INTEGRATION PROCESS ON STANDARD AND HIGH RESISTIVITY SILICON

Author(s):
Publication title:
1999 International Conference on High Density Packaging and MCMs : 6-9 April 1999, The Adam's Mark Hotel, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3830
Pub. Year:
1999
Page(from):
194
Page(to):
199
Pub. info.:
Reston, VA: IMAPS
ISSN:
0277786X
ISBN:
9780930815578 [0930815572]
Language:
English
Call no.:
P63600/3830
Type:
Conference Proceedings

Similar Items:

Franssila, S., Kattelus, H., Pirila, N., Riihisaari, T.

Electrochemical Society

R. Puurunen, J. Saarilahti, H. Kattelus

Electrochemical Society

Kattelus, H.P.

Electrochemical Society

Kanniainen, T., Skarp, J., Kattelus, H.

Electrochemical Society

Xia, Z., Ristolainen, E., Elliman, R., Ronkainen, H., Eranen, S., Kuivalainen, P., Sopanen, M., Tuomi, T., Holloway, P.

MRS - Materials Research Society

Franssila, S., Kattelus, H.P.

Electrochemical Society

Schuize, H.-J., Frohnmeyer, A., Niedernostheide, F.-J., Hille, F., Ttitto, P., Pavelka, T., Wachutka, U.

Electrochemical Society

Denteneer,P.J.H., Walle,C.G.Van de, Bar-Yam,Y., Pantelides,S.T.

Trans Tech Publications

Suni, I., Ronkainen, H., Eranen,S., Murto, T., Krontiras, Ch., Finetti, M.

Materials Research Society

Dixson,R.G., Orji,N.G., Fu,J., Tsai,V., Williams,E.D., Kacker,R., Vorburger,T.V., Edwards,H.L., Cook,D., West,P.E., …

SPIE-The International Society for Optical Engineering

Schulze,H.-J., Frohnmeyer,A., Niedernostheide,F.-J., Hille,F., Tutto,P., Pavelka,T., Wachutka,G.

Electrochemical Society, SPIE-The International Society for Optical Engineering

Powers, J.M., Roberts, J.M., Zimmerman, P.A., Meagley, R.P., Putna, E.S., Shah, U.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12