1.

Conference Proceedings
Conference Proceedings
1. SAMPLE (Sandia agile MEMS prototyping,layout tools,and education)
Craig Barron,C. ; Davies,B.R. ; Sniegowski,J.J. ; Rodgers,M.S. ; Comtois,J.H. ; Michalicek,M.A.
Pub. info.: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas.  pp.10-16,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3223
2.

Conference Proceedings
Conference Proceedings
2. Combined photonics and MEMS function demonstration
Blum,O. ; Warren,M.E. ; Hou,H.Q. ; Carson,R.F. ; Choquette,K.D. ; Rodgers,M.S. ; Sniegowski,J.J.
Pub. info.: Vertical-Cavity Surface-Emitting Lasers II.  pp.57-61,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3286
3.

Conference Proceedings
Conference Proceedings
3. Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology (Invited Paper)
Smith,J.H. ; Rodgers,M.S. ; Sniegowski,S.L. ; Miller,S.L. ; Hetherington,D.L. ; McWhorter,P.J. ; Warren,M.E.
Pub. info.: Micromachined Devices and Components IV.  pp.42-47,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
4.

Conference Proceedings
Conference Proceedings
4. Linkage design effect on the reliability of surface-micromachined microengines driving a load
Tanner,D.M. ; Peterson,K.A. ; Irwin,L.A. ; Tangyunyong,P. ; Miller,W.M. ; Eaton,W.P. ; Smith,N.F. ; Rodgers,M.S.
Pub. info.: Materials and Device Characterization in Micromachining.  pp.215-226,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3512
5.

Conference Proceedings
Conference Proceedings
5. Ultrasonic actuation for MEMS dormancy-related stiction reduction
Kaajakari,V. ; Kan,S.-H. ; Lin,L.-J. ; Lal,A. ; Rodgers,M.S.
Pub. info.: MEMS Reliability for Critical Applications.  pp.60-65,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4180
6.

Conference Proceedings
Conference Proceedings
6. Development of a compact optical MEMS scanner with integrated VCSEL Light source and diffractive optics
Krygowski,T.W. ; Reyes,D. ; Rodgers,M.S. ; Smith,J.H. ; Warren,M.E. ; Sweatt,W.C. ; Blum-Spahn,O. ; Wendt,J.R. ; Asbill,R.E.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.20-28,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878
7.

Conference Proceedings
Conference Proceedings
7. Microelectromechanical high-density energy storage/rapid release system
Rodgers,M.S. ; AIlen,J.J. ; Meeks,K.D. ; Jensen,B.D. ; Miller,S.L.
Pub. info.: Micromachined Devices and Components V.  pp.212-222,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3876
8.

Conference Proceedings
Conference Proceedings
8. SAMPLE (Sandia agile MEMS prototyping,layout tools,and education)
Davies,B.R. ; Craig Barron,C. ; Sniegowski,J.J. ; Rodgers,M.S.
Pub. info.: Microelectronic Structures and MEMS for Optical Processing III.  pp.11-21,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3226
9.

Conference Proceedings
Conference Proceedings
9. Routes to failure in rotating MEMS devices experiencing sliding friction
Miller,S.L. ; LaVigne,C. ; Rodgers,M.S. ; Sniegowski,J.J. ; Waters,J.P. ; McWhorter,P.J.
Pub. info.: Micromachined Devices and Components III.  pp.24-30,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224