MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK. pp.380-387, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Infrared astronomical instrumentation : 23-25 March 1998, Kona, Hawaii. Part 1 pp.269-280, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Education in microelectronics and MEMS : 28-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.100-109, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA. pp.261-271, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.572-580, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.546-552, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
High-power laser ablation III, 24-28 April 2000, Santa Fe, USA. pp.452-460, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 25-30 August 1996, Heriot-Watt University, Edinburgh, UK. pp.471-476, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering