1.

Conference Proceedings
Conference Proceedings
1. 150-nm dense/isolated contact hole study with Canon IDEAL technique
Ebihara,T. ; Rhyins,P. ; Oga,T. ; Martin,P.M. ; Sweis,M.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.1068-1076,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
2.

Conference Proceedings
Conference Proceedings
2. Characterization of quartz-etched PSM masks for KrF lithography at the 100-nm node
Rhyins,P. ; Fritze,M. ; Chan,D. ; Carney,C. ; Blachowicz,B.A. ; Vieira,M. ; Mack,C.A.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.486-495,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562