1.

Conference Proceedings
Conference Proceedings
1. Investigation of the physical and practical limits of dense-only phase-shift lithography for circuit feature definition
Tyrrell, B. ; Fritze, M. ; Mallen, R.D. ; Wheeler, B. ; Rhyins, P.D. ; Martin, P.M.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.503-516,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. Dense only phase-shift template lithography
Fritze, M. ; Tyrrell, B. ; Mallen, R.D. ; Wheeler, B. ; Rhyins, P.D. ; Martin, P.M.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.15-29,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
3.

Conference Proceedings
Conference Proceedings
3. Minimization of image placement errors in chromeless phase-shift mask lithography
Fritze, M. ; Tyrrell, B. ; Cann, S.G. ; Carney, C. ; Blachowicz, B.A. ; Brzozowy, D. ; Kocab, T. ; Bowdoin, S. ; Rhyins, P.D. ; Progler, C.J. ; Martin, P.
Pub. info.: Optical Microlithography XV.  Part One  pp.426-436,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
4.

Conference Proceedings
Conference Proceedings
4. Fabrication of Step and Flash imprint lithography templates using commercial mask processes
Thompson, E. ; Rhyins, P.D. ; Voisin, R.D. ; Sreenivasan, S.V. ; Martin, P.M.
Pub. info.: Emerging Lithographic Technologies VII.  2  pp.1019-1028,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037