1.

Conference Proceedings
Conference Proceedings
1. MINIMIZING SULFUR CONTAMINATION AND RINSE WATER VOLUME REQUIRED FOLLOWING A SULPHURIC ACID/HYDROGEN PEROXIDE CLEAN BY PERFORMING A CHEMICALLY BASIC CLEAN
Matlock, C.A. ; Resnick, P.J. ; Adkin, C.L.J.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.23-30,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. A DESIGN OF EXPERIMENTS APPROACH TO AN OPTIMIZED SC-1/MEGASONIC CLEAN FOR SUB-0.15 MICRON PARTICLE REMOVAL
Resnick, P.J. ; Adkins, C.L.J. ; Clews, P.J. ; Thomas, E.V. ; Cannaday, S.T.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.450-457,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
3.

Conference Proceedings
Conference Proceedings
3. 5 Cleaning Optimization for Reduced Chemical Usage
Resnick, P.J. ; Simonson, R.J. ; Nelson, G.C. ; Matlock, C.A. ; Kelly, M.J.
Pub. info.: Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology: applications in electronics.  pp.57-67,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-21
4.

Conference Proceedings
Conference Proceedings
4. SULFURIC ACID/HYDROGEN PEROXIDE RINSING STUDY
Clews, P.J. ; Nelson, G.C. ; Matlock, C.A. ; Resnick, P.J. ; Adkins, C.L.J. ; Korbe, N.C.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.66-73,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20
5.

Conference Proceedings
Conference Proceedings
5. A STUDY OF LIGHT POINT DEFECT REMOVAL BY SC-1 CHEMISTRIES
Resnick, P.J. ; Adkins, C.L.J. ; Matlock, C.A. ; Kelly, M.J. ; Clews, P.J. ; Korbe, N.C.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.589-596,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20
6.

Conference Proceedings
Conference Proceedings
6. Diffusive transport in supercritical CO2 drying of MEMS structures
Resnick, P.J. ; Hankins, M.G.
Pub. info.: Reliability, Testing, and Characterization of MEMS/MOEMS II.  pp.229-237,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4980
7.

Conference Proceedings
Conference Proceedings
7. Vapor deposition of amino-functionalized self-assembled monolayers on MEMS
Hankins, M.G. ; Resnick, P.J. ; Clews, P.J. ; Mayer, T.M. ; Wheeler, D.R. ; Tanner, D.M. ; Plass, R.A.
Pub. info.: Reliability, Testing, and Characterization of MEMS/MOEMS II.  pp.238-247,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4980