Influence of Non-Vertical Sidewall on FinFET Threshold Voltage
- Author(s):
- Publication title:
- Microelectronics Technology and Devices : SBMICRO 2006
- Title of ser.:
- ECS transactions
- Ser. no.:
- 4(1)
- Pub. Year:
- 2006
- Page(from):
- 275
- Page(to):
- 282
- Pages:
- 8
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775120 [1566775124]
- Language:
- English
- Call no.:
- E23400/4-1
- Type:
- Conference Proceedings
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