1.

Conference Proceedings
Conference Proceedings
1. A Novel Low Temperature Self-Aligned Ti Silicide Technology for Sub-0.18ｦﾌm CMOS Devices
Ren, L. P. ; Liu, P. ; Pan, G. Z. ; Woo, Jason C. S.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.313-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
2.

Conference Proceedings
Conference Proceedings
2. A Novel Low-Temperature Self-Aligned Ti Silicide Technology for Sub-0.18 ｦﾌm CMOS Devices
Ren, L. P. ; Liu, P. ; Pan, G. Z. ; Woo, Jason C. S.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.245-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514