1.

Conference Proceedings
Conference Proceedings
1. An Environmentally Benign BEOL Clean
Shrinivasan, K. ; Reinhardt, K. ; Shimanovich, A. ; Sadkowski, P.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.122-132,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
2.

Conference Proceedings
Conference Proceedings
2. AN ADVANCED BEOL CLEANING METHOD
Reinhardt, K. ; Shrinivasan, K. ; Shimanovich, A. ; Beery, D.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.303-311,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
3.

Conference Proceedings
Conference Proceedings
3. EFFECTS OF SURFACE AND BULK DEFECTS IN InP
Warren, C. ; Reinhardt, K. ; Singh, A. ; Lee, Y. S. ; Anderson, W. A.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.491-494,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
4.

Conference Proceedings
Conference Proceedings
4. AN EFFECTIVE IN-SITU O2 HIGH DENSITY PLASMA CLEAN
Reinhardt, K. ; Divincenzo, B. ; Yang, C.-L. ; Arleo, P. ; Marks, J. ; Mikulan, P. ; Gu, T. ; Fonash, S.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.267-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
5.

Conference Proceedings
Conference Proceedings
5. Defect Dominant Junction Characteristics of 4H-SiC p+/n Diodes
Scofield, J. ; Dunn, M. ; Reinhardt, K. ; Yeo, Y. K. ; Hengehold, R.
Pub. info.: III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A..  pp.57-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 423
6.

Conference Proceedings
Conference Proceedings
6. Electrical Characterization of Damage Phenomena Induced in Silicon by Magnetically-Enhanced Reactive Ion Etching
Awadelkarim, O.O. ; Gu, T. ; Mikulan, P.I. ; Fonash, S.J. ; Reinhardt, K. ; Chan, Y.D.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.331-342,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
7.

Conference Proceedings
Conference Proceedings
7. Effects of Oxide Etching on Silicon Substrate Quality
Reinhardt, K. ; White, A. ; Marks, J. ; DiVincenzo, B. ; Gu, T. ; Fonash, S.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.353-361,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
8.

Conference Proceedings
Conference Proceedings
8. Investigation of Hydrogen Permeation Doping Deactivation Caused by Oxide Etching
Reinhardt, K. ; Gondran, C. ; Marks, J. ; DiVincenzo, B. ; Awadelkarim, O. ; Fonash, S.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.343-352,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
9.

Conference Proceedings
Conference Proceedings
9. Analysis of Silicon Damage and Surface Contamination Caused by Oxide Etching
Reinhardt, K. ; Busch, E. ; Kelso, S.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.202-208,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5