1.

Conference Proceedings
Conference Proceedings
1. Progress in gray-tone lithography and replication techniques for different materials
Reimer,K. ; Engelke,R. ; Hofmann,U. ; Merz,P. ; Platen,K.T.Kohlmann von ; Wagner,B.
Pub. info.: Micromachine technology for diffractive and holographic optics : 20-21 September 1999, Santa Clara, California.  pp.98-105,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3879
2.

Conference Proceedings
Conference Proceedings
2. Micro-optic fabrication using one-level gray-tone lithography
Reimer,K. ; Quenzer,H.-J. ; Jurss,M. ; Wagner,B.
Pub. info.: Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California.  pp.279-288,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3008
3.

Conference Proceedings
Conference Proceedings
3. One-level gray-tone lithography:mask data preparation and pattern transfer
Reimer,K. ; Quenzer,H. ; Demmeler,R. ; Wagner,B.
Pub. info.: Micro-optical technologies for measurement, sensors, and microsystems : 12-13 June 1996, Besançon, France.  pp.71-79,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2783
4.

Conference Proceedings
Conference Proceedings
4. 16-k infrared micromirror arrays with large-beam deflection and .10-mm pixel size
Reimer,K. ; Engelke,R. ; Witt,M. ; Wagner,B.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.272-280,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878
5.

Conference Proceedings
Conference Proceedings
5. Fabrication of microrelief surfaces using a one-step lithography process (Invited Paper)
Reimer,K. ; Hofmann,U. ; Jurss,M. ; Pulz,W. ; Quenzer,H.J. ; Wagner,B.
Pub. info.: Microelectronic Structures and MEMS for Optical Processing III.  pp.2-10,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3226