MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK. pp.395-403, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995. pp.1847-1852, 1995. Zurich, Switzerland. Trans Tech Publications
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