Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part1 pp.10-17, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Microlithographic Techniques in Integrated Circuit Fabrication II. pp.77-82, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering