1.

Conference Proceedings

Conference Proceedings
Kling,M.E. ; Cave,N. ; Falch,B.J. ; Fu,C.-C. ; Green,K.G. ; Lucas,K.D. ; Roman,B.J. ; Reich,A.J. ; Sturtevant,J.L. ; Tian,R. ; Russell,D.R. ; Karklin,L. ; Wang,Y.-T.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.10-17,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings

Conference Proceedings
Reich,A.J. ; Jarvis,R.D. ; Talent,S. ; Carter,R.
Pub. info.: Microlithographic Techniques in Integrated Circuit Fabrication II.  pp.77-82,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4226
3.

Conference Proceedings

Conference Proceedings
Wang,R. ; Grobman,W.D. ; Reich,A.J. ; Thompson,M.A.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.406-417,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562