1.

Conference Proceedings

Conference Proceedings
Spisser,A. ; Regreny,P. ; Seassal,C. ; Leclercq,J.-L. ; Viktorovitch,P.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.622-631,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings

Conference Proceedings
Bondavalli,P. ; Benyattou,T. ; Garrigues,M. ; Leclercq,J.L. ; Regreny,P. ; Sun,K. ; Viktorovitch,P. ; Cortial,S. ; Hugon,X. ; Pautet,C.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.174-184,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878