Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA. pp.169-180, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1997 : industrial and commercial applications of smart structures technologies : 4-6 March 1997, San Diego, California. pp.295-306, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 2000 : Smart structures and integrated systems : 6-9 March, 2000, Newport Beach, USA. pp.294-305, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1996 : Industrial and commercial applications of smart structures technologies : 27-29 February 1996, San Diego, California. pp.353-363, 1996. Bellingham. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV. pp.54-60, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering