1.

Conference Proceedings

Conference Proceedings
Crozier, B. T. ; Boer, M. P. de ; Redmond, J. M. ; Bahr, D. F. ; Michalske, T. A.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.129-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605
2.

Technical Paper

Technical Paper
Sumali, H. ; Martin, J. W. ; Chaplya, P. ; Redmond, J. M.
Pub. info.: A.S.M.E. paper.  2003.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : IMECE
Ser. no.: 2003