Warrick, S. ; Hinnen, P. ; Morton, R. ; Cooper, K. ; Sassoulas, P.-O. ; Depre, J. ; Navarro, R. ; van Haren, R. ; Browning, C. ; Reber, D. ; Megens, H.
Pub. info.:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.154-163, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Womer, T. W. ; Wagner, J. R. Jr. ; Harrah, G. ; Reber, D.
Pub. info.:
ANTEC 2000 Conference proceedings, May 7-11, 2000, Orlando, Florida. pp.259-264, 2000. Brookfield Center, CT. Society of Plastics Engineers, Inc. (SPE)
Title of ser.:
Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers