1.

Conference Proceedings

Conference Proceedings
Wang, C. ; Zhang, G. ; DeMoor, S.J. ; Boehm, M.A. ; Littau, M.E. ; Raymond, C.J.
Pub. info.: Optical Microlithography XVI.  Part One  pp.541-552,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
2.

Conference Proceedings

Conference Proceedings
Raymond, C.J. ; Littau, M.E. ; Youn, B.J. ; Sohn, C.-J. ; Kim, J.A. ; Kang, Y.S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.577-584,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
3.

Conference Proceedings

Conference Proceedings
Wang, C. ; Zhang, G. ; Tan, C.L. ; Atkinson, C. ; Boehm, M.A. ; Brown, J.M. ; Godfrey, D. ; Littau, M.E. ; Raymond, C.J.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1456-1464,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
4.

Conference Proceedings

Conference Proceedings
Littau, M.E. ; Raymond, C.J. ; Gould, C.J. ; Gambill, C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.506-516,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
5.

Conference Proceedings

Conference Proceedings
Raymond, C.J. ; Littau, M.E. ; Chuprin, A. ; Ward, S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.564-575,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
6.

Conference Proceedings

Conference Proceedings
Kim, J.- ; Kim, S.-J. ; Chin, S.-B. ; Oh, S.-H. ; Goo, D.-H. ; Lee, S.-J. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T. ; Raymond, C.J. ; Littau, M.E. ; Youn, B.J. ; Sohn, C.-J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.541-549,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375