1.

Conference Proceedings
Conference Proceedings
1. Impurity Solubility and Redistribution Due to Recrystallization of Preamorphized Silicon
Ray Duffy ; Vincent Venezia ; Marco Hopstaken ; Geert Maas ; Thuy Dao ; Yde Tamminga ; Fred Roozeboom ; Karel van der Tak
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.119-130,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
2.

Conference Proceedings
Conference Proceedings
2. Analysis and Optimization of New Implantation and Activation Mechanisms in Ultra Shallow Junction Implants Using Scanning Spreading Resistance Microscopy (SSRM)
Pierre Eyben ; Simone Severi ; Ray Duffy ; Bartek J. Pawlak ; Emmanuel Augendre ; Wilfried Vandervorst
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.203-210,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
3.

Conference Proceedings
Conference Proceedings
3. The Carbon Co-Implant With Spike RTA Solution for Phosphorus Extension
Bartek J. Pawlak ; Ray Duffy ; Emmanuel Augendre ; Simone Severi ; Tom Janssens ; Philippe Absil ; Wilfried Vandervorst ; Erik Collart ; Susan Felch ; Robert Schreutelkamp ; Nick Cowern
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.33-38,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
4.

Conference Proceedings
Conference Proceedings
4. Ion Implantation for LOW-Resistive Source/Drain Contacts in Finfet Devices
Mark J. H. van Dal ; Ray Duffy ; Bartek J. Pawlak ; Nadine Collaert ; Malgorzata Jurczak ; Robert J. P. Lander
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.67-78,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070
5.

Conference Proceedings
Conference Proceedings
5. F⁺ Implants in Crystalline Si: The Si Interstitial Contribution
Pedro Lopez ; Lourdes Pelaz ; Ray Duffy ; P. Meunier-Beillard ; F. Roozeboom ; K. van der Tak ; P. Breimer ; J. G. M. van Berkum ; M. A. Verheijen ; M. Kaiser
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.279-284,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070
6.

Conference Proceedings
Conference Proceedings
6. Doping of Sub-50nm SOI Layers
Bartek J. Pawlak ; Ray Duffy ; Mark van Dal ; Frans Voogt ; Robbert Weemaes ; Fred Roozeboom ; Peer Zalm ; Nick Bennett ; Nick Cowern
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.169-176,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070