1.

Conference Proceedings
Conference Proceedings
1. SINGLE STEP LOW TEMPERATURE IN-SITU SUBSTRATE CLEANING FOR SILICON PROCESSING
Ramm, Juergen ; Beck, Eugen ; Steiner, Franz-Peter ; Pixley, Ralph E. ; Eisele, Ignaz
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.249-254,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. LOW TEMPERATURE IN-SITU PROCESSING FOR Si-MBE
Ramm, Juergen ; Beck, Eugen ; Zueger, Albert
Pub. info.: Silicon molecular beam epitaxy : symposium held April 29-May 3, 1991, Anaheim, California, U.S.A..  pp.15-20,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 220
3.

Conference Proceedings
Conference Proceedings
3. DRY HYDROGEN PLASMA CLEANING FOR LOCAL EPITAXIAL GROWTH
Ramm, Juergen ; Beck, Eugen ; Eisele, Ignaz ; Hansch, Walter ; Klepser, Bernd-Ulrich ; Senn, Hans
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.91-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315