Specht, E.D. ; Rack, P.D. ; Rar, A. ; Pharr, G.M. ; George, E.P. ; Hong, H.
Pub. info.:
Combinatorial and artificial intelligence methods in materials science II : symposium held December 1-4, Boston, Massachusetts, U.S.A. pp.45-50, 2004. Warrendale, Pa.. Materials Research Society
Progress in semiconductors II : electronic and optoelectronic applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.. pp.119-130, 2003. Warrendale, Pa.. Materials Research Society
Rack, P.D. ; Fitz-Gerald, J.M. ; Geiculescu, A.C. ; Rack, H.J. ; Pique, A. ; Auyeung, R.C.Y. ; Chrisey, D.B.
Pub. info.:
Materials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.29-34, 2001. Warrendale, Pa.. Materials Research Society
Rack, P.D. ; Thesen, A. ; Randolph, S. ; Fowlkes, J.D. ; Joy, D.C.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVII. 2 pp.943-949, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering