Lercel, M.J. ; Fisch, E. ; Racette, K.C. ; Lawliss, M. ; Williams, C. T. ; Kindt, L. ; Huang, C.
Pub. info.:
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. pp.18-22, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Fisch, E. ; Racette, K.C. ; Folta, J.A. ; Larson, C.C.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.1041-1047, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Fisch, E. ; Kindt, L. ; Lercel, M.J. ; Racette, K.C. ; Williams, C.T.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology IX. pp.865-871, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering