Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering

Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering

Author(s):

Publication title:

Optoelectronic materials : Selected, peer reviewed papers from the 2010 International Conference on Optical, Electronic and Electrical Materials, August 1-4, Kunming, China, OEEM 2010

Title of ser.:

Materials science forum

Ser. no.:

663-665

Pub. Year:

2010

Pt.:

2

Page(from):

1293

Page(to):

1297

Pages:

5

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00054167
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Optical, Electronic and Electrical Materials
Conf. info. (Number):	2010
Conf. info. (Venue):	Kunming, China
Conf. info. (Date):	2010.08.01-2010.08.04
Note for article:	2010 International Conference on Optical, Electronic and Electrical Materials, August 1-4, Kunming, China

Similar Items:

1 Conference Proceedings Effect of annealing temperature on the structural and optical properties of Al-doped ZnO films by RF magnetron sputtering Y. Wu, B. Huang, L. Zhang, S. Wu Society of Photo-optical Instrumentation Engineers	7 Conference Proceedings Investigation of Optical Properties of ZnO Films Deposited by RF Magnetron Sputtering S. Li, F.X. Wang, G. Fu, Y.J. Ji, J.Q. Zhao Trans Tech Publications
2 Conference Proceedings Structural and optical properties of Al-doped ZnO films coated by RF magnetron sputtering Y.-B. Wu, B. Huang, L.-T. Zhang, J. Li, S.-T. Wu Society of Photo-optical Instrumentation Engineers	8 Conference Proceedings The Effect of Target to Substrate Distance on the Properties of HAZO Films Deposited by Magnetron Sputtering W.M. Lu, J. Zhang, H.W. Diao, L. Zhao, W.J. Wang Trans Tech Publications
3 Conference Proceedings The nanostructures and optical properties of ZnO films by RF magnetron sputtering Huang, B., Wu, S., Li, J., Sun, S., Tian, Z. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Effects of Substrate Temperature on the Microstructure and Properties of Al-Doped ZnO Thin Films by DC Magnetron Sputtering from AZOY® Target Yao, Pin Chuan, Hang, Shih Tse, Wu, Menq Jiun Trans Tech Publications
4 Conference Proceedings Effects of Power on Properties of ZnO:Al Films Deposited on Flexible Substrates by RF Magnetron Sputtering X.J. Wang, Q.S. Lei, J.M. Yuan, W.L. Zhou, J. Yu Trans Tech Publications	10 Conference Proceedings Mechanical and Electrical Properties of Ga-Doped ZnO Films Deposited on Flexible Substrate by DC Magnetron Sputtering D.Y. Lee, J.R. Lee, D.G. Kim, G.H. Lee, Y.S. Kim Trans Tech Publications
5 Conference Proceedings Influence of Substrate Temperature on the Al and Zr Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering F. Huan, J.F. Leng, Z.C. Meng, B. Sun, W.S. He Trans Tech Publications	11 Conference Proceedings DEPOSITION OF ALUMINUM NITRIDE FILM BY ION BEAM ENHANCED REACTIVE MAGNETRON SPUTTERING Huang, R. F., Wen, L. S., Wang, H., Wu, J., Hong, R. J. Materials Research Society
6 Conference Proceedings The properties of ZnO thin films fabricated by ion beam sputtering and RF magnetron sputtering X. X. He, H. Q. Li, J. B. Gu, S. B. Wu, B. Cao Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings Effect of RF Power on the Properties of Magnetron Sputtered ZnO:Al Thin Films Deposited at Room Temperature M. Selmi, F. Chaabouni, M. Abaab, B. Rezig Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12