Deep Trench Etching in Macroporous Silicon - Application to Photonic Crystal Gas Sensors
- Author(s):
- Publication title:
- Porous semiconductors : a symposium held in memory of Vitali Parkhutik and Volker Lehmann
- Title of ser.:
- ECS transactions
- Ser. no.:
- 16(3)
- Pub. Year:
- 2008
- Page(from):
- 61
- Page(to):
- 67
- Pages:
- 7
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566776493 [156677649X]
- Language:
- English
- Call no.:
- E23400/16-3
- Type:
- Conference Proceedings
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