1.

Conference Proceedings
Conference Proceedings
1. The application of SMASH alignment system for 65-55-nm logic devices
M. Miyasaka ; H. Saito ; T. Tamura ; T. Uchiyama ; P. Hinnen ; H. Lee ; M. van Kemenade ; M. Shahrjerdy ; R. van Leeuwen
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings
Conference Proceedings
2. Low noise high power ultra-stable diode pumped Er-Yb phosphate glass laser
R. van Leeuwen ; B. Xu ; L. S. Watkins ; Q. Wang ; C. Ghosh
Pub. info.: Enabling photonics technologies for defense, security, and aerospace applications IV : 17-18 March 2008, Orlando, Florida, USA.  pp.69750K-1-69750K-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6975