1.

Conference Proceedings
Conference Proceedings
1. Single crystal critical dimension reference materials (SCCDRM): process optimization for the next generation of standards
R. G. Dixson ; W. F. Guthrie ; M. Cresswell ; R. A. Allen ; N. G. Orji
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings
Conference Proceedings
2. TEM calibration methods for critical dimension standards
N. G. Orji ; R. G. Dixson ; D. I. Garcia-Gutierrez ; B. D. Bunday ; M. Bishop ; M. W. Cresswell ; R. A. Allen ; J. A. Allgair
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
3.

Conference Proceedings
Conference Proceedings
3. Toward accurate feature shape metrology
N. G. Orji ; R. G. Dixson ; B. D. Bunday ; J. A. Allgair
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.692208-1-692208-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
4.

Conference Proceedings
Conference Proceedings
4. Accuracy considerations for critical dimension semiconductor metrology
N. G. Orji ; R. G. Dixson ; B. D. Bunday ; J. A. Allgair
Pub. info.: Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA.  pp.70420A-1-70420A-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7042