Assessment of EUV reticle blank availability enabling the use of EUV tools today and in the future
- Author(s):
R. Jonckheere ( IMEC vzw (Belgium) ) G. F. Lorusso ( IMEC vzw (Belgium) ) A. Goethals ( IMEC vzw (Belgium) ) K. Ronse ( IMEC vzw (Belgium) ) J. Hermans ( IMEC vzw (Belgium) ) R. D. Ruyter ( IMEC vzw (Belgium) ) - Publication title:
- EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6533
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466556 [0819466557]
- Language:
- English
- Call no.:
- P63600/6533
- Type:
- Conference Proceedings
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