1.
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Conference Proceedings
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R. G. Dixson ; W. F. Guthrie ; M. Cresswell ; R. A. Allen ; N. G. Orji
Pub. info.: |
Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6518 |
|
2.
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Conference Proceedings
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N. G. Orji ; R. G. Dixson ; D. I. Garcia-Gutierrez ; B. D. Bunday ; M. Bishop ; M. W. Cresswell ; R. A. Allen ; J. A. Allgair
Pub. info.: |
Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6518 |
|
3.
|
Conference Proceedings
|
R. Dixson ; N. G. Orji ; J. Potzick ; J. Fu ; R. A. Allen
Pub. info.: |
Photomask technology 2007. 2 pp.67303D-1-67303D-13, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6730 |
|