1.

Conference Proceedings
Conference Proceedings
1. Structural and Optical Characterization of Polycrystalline Silicon Films Deposited by Single Wafer CVD
Sassela, A. ; Borghesi, A. ; Amore, G. ; Tallarida, G. ; Spiga, S. ; Cazzaniga, F. ; Ferroni, G. ; Queirolo, G.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1282-1288,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. IMPACT OF POLYCRYSTALLINE SILICON PROCESSING ON PROPERTIES OF MOS MEMORY DEVICES
Queirolo, G. ; Brambilla, M. ; Mavero, C.
Pub. info.: Polysilicon thin films and interfaces.  pp.269-274,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182
3.

Conference Proceedings
Conference Proceedings
3. Doping Influence on TiSi2 C49-C54 Conversion Kinetics by Micro-Raman Spectroscopy
Meinardi, F. ; Quilici, S. ; Moro, L. ; Queirolo, G. ; Sabbadini, A.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.387-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
4.

Conference Proceedings
Conference Proceedings
4. Effects of Ion Metal Plasma (IMP) Titanium Deposition on Ti Silicide Formation
Sabbadini, A. ; Cazzaniga, F. ; Brambilla, M. ; Bresolin, C. ; Cusi, V. ; Marangon, T. ; Queirolo, G.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.23-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
5.

Conference Proceedings
Conference Proceedings
5. Physical-Chemical Evolution Upon Thermal Treatments of Al2O3, HfO2 and Al/Hf Composite Materials Deposited by ALCVDTM
Crivelli, B. ; Alessandri, M. ; Alberici, S. ; Cazzaniga, F. ; Dekadjevi, D. ; Maes, J.W. ; Ottaviani, G. ; Pavia, G. ; Queirolo, G. ; Santucci, S. ; Zanderigo, F.
Pub. info.: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.149-154,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 745