1.

Conference Proceedings

Conference Proceedings
Jha, N. ; Shin, H. ; Hills, G.W. ; Qian, X.Y. ; Hu, C.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.319-330,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
2.

Conference Proceedings

Conference Proceedings
Hemker, D.J. ; Qian, X.Y. ; Lum, R.T. ; Hills, G.W.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.149-159,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21